New Cleanroom Tools
New Probe Station. MNC has installed a new probe station generously donated by EverBeing International Corporation headquartered in Taiwan. This new probe station will greatly enhance our capabilities in DC and low frequency electrical characterization, and will be located in Area 3 (1-132) in Keller Hall.
installed in bay 3 of the PAN cleanroom. This tool extends the capabilities of our existing thermal ALD tool that is focused on oxide films such as silicon dioxide, titanium dioxide and hafnium dioxide. The Fiji tool will greatly expand our ALD capabilities to include nitride and metal films. Specific films will include titanium nitride, hafnium nitride, and silicon nitride as well as silver and platinum films.
tool for chemical vapor deposition (CVD) of a variety of films. While similar to a standard
plasma-enhanced CVD tool, the high density plasma source enables high quality films at
much lower deposition temperatures, even under 100°C, which cannot be done with our current PECVD tool. The Apex SLR tool is set up for depositing the following films: silicon nitride, silicon dioxide, doped silicon dioxide (boron or phosphorus), silicon carbide, and diamond-like carbon
New Nanoparticle Tools
NanoSight Nanoparticle Tracking Analyzer (NTA). The NTA technique captures images of the sample particles undergoing Brownian motion in a liquid, and using frame-by-frame video image analysis, calculates particle sizes and diffusion coefficients. The NTA can yield the size distributions of particles from about 10 to 2000 nm, and is particularly useful for very dilute dispersions. The new NanoSight complements our other tools for particle analysis, including dynamic light scattering and laser diffraction tools for particle sizing, a zeta potential system, and an optical particle analyzer to obtain information on particle shape.