Mask Making

LaserwriterThe MNC has a Heidelberg DWL200 laserwriter for making masks.

If you need a mask made, there are two different options available:

  1. Submit your design file to have MNC staff make the mask for you. *See design rules below.
    • Best option if you only have a few masks to make. 
  2. Get training on the laserwriter tool to make your own masks. *Must be a current lab user.
    • Best option if you have many masks to make.

 

Design Rules

  • Scale in microns, 1:1. One unit on the design is equal to 1um.
  • File formats- gdsii, dxf (version 12)
  • Do not scale features, cells or text.
  • One gds or dxf layer per mask.
  • Maximum useable area for a 4”x4” mask is 80mmx80mm with label and 85mmx85mm without label.
  • Maximum useable area for 5”x5” mask is 110mmx110mm with label and 112mmx112mm without label.
  • Polygons must be closed.
  • Do not cross polylines- crossed polylines create ambiguities that lead to data errors.
  • Do not create double vertices-double vertices are successive points with identical coordinates. These points can lead to data errors.
  • Do not use main as a name layer, cell or any structure.
  • Do not use special characters or spaces in names.
  • Single lines without width will be ignored.
  • Polygons must show no more than 1,000,000 vertices.
  • Definition or reference depth can be at maximum 16.
  • The number of definition or references can be at maximum 100,000.
  • Designs must not exceed the limits of 2000mm from (0,0) in either axis.
  • Avoid placing structures in layer 0.

     

    Feature Size Design Rules specific to 5mm write head

    • All features (lines, spaces, rectangles, etc.) 1.5um or larger.
    • Circles 3.0um or larger
    • Text 25um or larger

     

    Feature Size Design Rules specific to 2mm write head

    • All features (lines, spaces, rectangles, circles etc. 1.0um or larger.
    • Circles 1.5um or larger
    • Text 15um or larger

     

    Mask Sizes, Printed Area Size and Materials

    • 5 inch square plate, 0.090” thick, printed area up to 110mm x 110mm, soda lime print grade photomask blank.
    • 4 inch square plate, 0.060” thick, printed area up to 80mm x 80mm, soda lime print grade photomask blank.
    • Other photomask size available 6” x 6”x 0.120”, 7” x 7” x 0.120”, 8”x 8” x 0.120” call or email for pricing and lead times.
    • Quartz available but not in stock call or email for lead time.